[1]Kui HAO,Caixia HUO,Shuo YU,等.Corrosion Resistance Mechanism of TaC-Coated Graphite in High-Temperature Silicon-Containing Steam Environments[J].中國(guó)材料進(jìn)展,2026,45(02):155-162.[doi:10.7502/j.issn.1674-3962.202501002]
Kui HAO,Caixia HUO,Shuo YU,et al.Corrosion Resistance Mechanism of TaC-Coated Graphite in High-Temperature Silicon-Containing Steam Environments[J].MATERIALS CHINA,2026,45(02):155-162.[doi:10.7502/j.issn.1674-3962.202501002]
點(diǎn)擊復(fù)制
Corrosion Resistance Mechanism of TaC-Coated Graphite in High-Temperature Silicon-Containing Steam Environments(
)
中國(guó)材料進(jìn)展[ISSN:1674-3962/CN:61-1473/TG]
- 卷:
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45
- 期數(shù):
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2026年02
- 頁(yè)碼:
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155-162
- 欄目:
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- 出版日期:
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2026-02-28
文章信息/Info
- Title:
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Corrosion Resistance Mechanism of TaC-Coated Graphite in High-Temperature Silicon-Containing Steam Environments
- 文章編號(hào):
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1674-3962(2026)02-0155-08
- 作者:
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Kui HAO; Caixia HUO; Shuo YU; Jianxin TU; Le SUN; Maolan YU; Ruicheng BAI; Fangzhou ZHANG; Aijun LI; Haoran LI
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- Author(s):
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Kui HAO; Caixia HUO; Shuo YU; Jianxin TU; Le SUN; Maolan YU; Ruicheng BAI; Fangzhou ZHANG; Aijun LI; Haoran LI
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School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China
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- Keywords:
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TaC coating; CVD; SiC; Si-containing vapor; corrosion
- 分類號(hào):
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TN304;TB304
- DOI:
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10.7502/j.issn.1674-3962.202501002
- 文獻(xiàn)標(biāo)志碼:
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A
- Abstract:
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High-purity graphite is extensively utilized in the semiconductor industry. Enhancing its corrosion resistance is crucial for reducing the manufacturing costs of the third-generation semiconductors. In this study, a continuous and dense TaC coating was fabricated on the surface of graphite using CVD method. The corrosion resistance and mechanism of the coating were investigated in a high-temperature steam environment. This environment involved temperatures exceeding 2200 K and the erosion of the coating by Sicontaining mixed steam flows. The results indicated that the corrosion in the affected areas was primarily due to chemical reactions, characterized by the formation of pores and micro-cracks, whereas failure areas were dominated by mechanical delamination, which led to macroscopic defects. Moreover, the mixed high-temperature steam corrosion of the TaC coating showed preferential selectivity, resulting in a stepped corrosion morphology at the crystalline level. The surface roughness of the samples significantly increased after corrosion, from 0.36 to 5.28 μm, although the surface composition remained largely unchanged. The TaC coating provides a certain level of protection to the graphite substrate, enhancing the service life of graphite components and demonstrating promising application potential.
備注/Memo
- 備注/Memo:
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Received date:2025-01-03Revised date:2025-03-03
Foundation item:Shanghai Natural Science Foundation(20ZR1419600)
First author:Kui HAO, Male, Born in 1990, Doctor
Corresponding author:Caixia HUO, Female, Born in 1988, Professor,
Email: huocaixia2021@shu.edu.cn
Aijun LI, Male, Born in 1975, Professor,
Email: aijun.li@shu.edu.cn
更新日期/Last Update:
2026-02-02