文章信息/Info

Title:

Recent Progress on Nanostructured High Frequency Soft Magnetic Thin Films

作者:

王藝程; 張懷武; 魯廣鐸; 白飛明

(電子科技大學(xué) 電子薄膜與集成器件國(guó)家重點(diǎn)實(shí)驗(yàn)室，四川 成都 610054)

Author(s):

WANG Yicheng;  ZHANG Huaiwu;  LU Guangduo;  BAI Feiming

(State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science��and Technology of China, Chengdu 610054, China)

關(guān)鍵詞:

高頻軟磁薄膜; 納米材料; 磁導(dǎo)率; 鐵磁共振頻率

DOI:

10.7502/j.issn.1674-3962.2012.07.06

文獻(xiàn)標(biāo)志碼:

A

摘要:

由于高頻軟磁薄膜材料具有巨大的應(yīng)用前景因此獲得了人們廣泛的關(guān)注。對(duì)納米合金軟磁薄膜、納米軟磁顆粒膜、多層膜以及圖形化薄膜進(jìn)行了分類綜述，分別介紹了各類薄膜的制備方法、化學(xué)成分、微觀結(jié)構(gòu)特點(diǎn)和高頻物理性能，并對(duì)影響其性能的主要因素進(jìn)行了討論。由于納米高頻軟磁薄膜材料相對(duì)于傳統(tǒng)磁性材料具有顯著優(yōu)勢(shì)，所以納米合金軟磁薄膜有望取代鐵氧體作為制作高頻磁性器件的主要應(yīng)用材料。由于納米軟磁顆粒膜、多層膜以及新興的圖形化薄膜具有材料結(jié)構(gòu)設(shè)計(jì)和物性剪裁的自由度，因此將是今后的重點(diǎn)研究方向。

Abstract:

Soft magnetic thin films have attracted much attention due to their great potentials in high frequency applications. The article summarizes the recent progress of nanocrystalline alloy soft magnetic films, nanogranular soft magnetic films, multilayer films and graphical films, respectively. Special attentions were given to the film preparation techniques, the chemical composition, the microstructure and the high frequency physical properties of the different films, and the main factors affecting the magnetic and high frequency properties were also discussed. Because of the much better properties and performance, nanocrystalline alloy soft magnetic films have replaced the ferrites as the major materials used in high frequency devices. Meanwhile, nanogranular soft magnetic films, multilayer films and emerging graphical films will be the trend in future, thanks to their great freedom in designing microstructure and tailoring materials properties.��